AMCs
Classification of AMCs by the International Semiconductor Industry Association (SEMI)
SEMI F21-1016 Classification of airborne molecular pollutant levels in clean environments
The dangers of AMCs
- Formation of a chemical gas film on the surface Silicon surface cleanliness Glass substrate cleanliness Optical lens surface Metal surface Plastic surface
- Changing surface properties Chemical properties (e.g., metal corrosion) Electrical properties (e.g., ion implantation) Physical properties (e.g., surface modification, static charge generation) Optical properties (e.g., photoresistance changes, photolithography yield)
- Forming particulate matter "fog" NH3 + SO2 → Salt Alkaline gas + acidic gas → salt
- EHS Requirements for Cleanroom Environment (VOCs, Acid Gases) Harming employee health and well-being Chemical safety applications and cleanroom risk requirements, such as UL and FM...