1. AMC- International Semiconductor Technology and Materials Association SEMI
As an important member in the field of filters, chemical filters play a crucial role due to their professionalism and particularity. Its main features include: high-efficiency filtration, high-temperature corrosion resistance, a variety of filter materials to choose from, convenient installation and maintenance, and intelligence, etc.
Chemical filters are the most important assistants in solutions for controlling gaseous pollutants. AMC can be further classified into four types: MA, MB, MC and MD. MA is a corrosive substance, and its chemical reaction characteristic is an electron acceptor. It usually includes hydrofluoric acid, chlorine gas, sulfuric acid and other substances that escape during photolithography and etching processes.
MB is a corrosive substance, and its chemical reaction characteristics are electron donors, including NH3 and amines. MC generally refers to organic compounds that have a boiling point greater than 150℃ under normal pressure and are prone to condensing onto the surface of objects. MD refers to a chemical element that can alter the electrical conductivity of semiconductor materials.
2、The installation location of chemical filters needs to take into account the specific application scenarios. The main considerations include: the source of pollutants, treatment efficiency and system design, etc. They are usually installed in systems such as fresh air air conditioning boxes, circulating return air air conditioning boxes, fan filter units and micro-environment ends.
3、The control of AMC can be achieved by using a gas-phase air filtration system, which employs one or more drying and purification media. The selection of chemical filter materials in this system is characterized by diversity and intelligence, providing users with more targeted options.
4、Chemical filters are widely used in industrial production processes such as electroplating, semiconductor manufacturing, medical care, laboratories, and environmental protection treatment. They ensure the safety of the production environment by adsorbing and neutralizing acidic/alkaline gases and organic waste gases.
